摘要
The performance of dielectric material is a key factor against a long time action in dielectric barrier discharge （DBD） plasma. In this study, the aging of the Al2O3 dielectric material was studied by the Atomic Force Microscope （AFM）, X-ray Photoelectron spectrum （XPS） and Auger electron spectrum （AES） methods. The results showerd that the performance of the dielectric does not descend after an 1000 h aging experiment. Therefore the thin dielectric layers of α-Al2O3 porcelain with a purity above 99% can sustain a long time action of DBD plasma and form gas ionization discharges steadily.
The performance of dielectric material is a key factor against a long time action in dielectric barrier discharge （DBD） plasma. In this study, the aging of the Al2O3 dielectric material was studied by the Atomic Force Microscope （AFM）, X-ray Photoelectron spectrum （XPS） and Auger electron spectrum （AES） methods. The results showerd that the performance of the dielectric does not descend after an 1000 h aging experiment. Therefore the thin dielectric layers of α-Al2O3 porcelain with a purity above 99% can sustain a long time action of DBD plasma and form gas ionization discharges steadily.
基金
supported by National Natural Science Foundation of China(No.60371035)
Special Prophase Project on Basic Research of National Commission of Science and Technology(No.2004ccA06300)
Project of Social Development of Dalian City(No.2004B3SF181)
