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一种新型传感器在表面轮廓测量中的应用 被引量:1

Application of New Type Synthesis Sensor in Profile Measurement
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摘要 介绍了一种新型的接触与非接触两用传感器,该传感器的非接触测量方式是基于改进傅科聚焦探测法原理,而接触测量方式则是基于微恒力电感测量原理。该传感器具有较大量程和较高分辨率等特点,可应用于表面轮廓测量系统中。 A new type of synthesis sensor for profile measurement is presented. The work principle of the non-contact probe is based on a Foucauh focus detection method, and contact measurement is found on inductance sensor with micro-force. The sensor has large range and high resolution, which can be applied to the profile measurement.
作者 陈育荣 程稳
出处 《湖北汽车工业学院学报》 2006年第4期31-33,共3页 Journal of Hubei University Of Automotive Technology
基金 湖北省自然科学基金项目(2006ABA040)
关键词 两用传感器 轮廓测量 傅科聚焦探测法 synthesis sensor profile measurement Foucauh focus detection method
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同被引文献4

  • 1廖艳春,谢铁邦.一种计量型二维精密工作台的研究[J].湖北工业大学学报,2005,20(5):122-124. 被引量:6
  • 2[1]Mike Holmes,Robert Hocken,David Trumper.The long range scanning stage:a novel platform for scanned probe microscopy[J].Prec.Eng.,2000,24:191-209.
  • 3[2]Mike Holmes,David Trumper.Magnetic/fluid bearing stage for atomic scale motion control (the angstrom stge)[J].Prec.Eng.,1996,18(1):38-49.
  • 4[3]Xuanze Wang,Xiaohua Dong,Jun Guo,Tiebang Xie.Two-dimensional displacement sensing using a cross diffraction grating scheme[J].Journal of Optics A:Pure and Applied Optics,2004,6(1):106-111.

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