摘要
本文中总结了纳米α-Fe2O3气敏粉体与薄膜制备技术的最新研究进展,综述了近几年气敏型α-Fe2O3纳米粉体及薄膜的制备技术,就灵敏度低、选择性差、性能不够稳定等α-Fe2O3气敏材料及元件研究中存在的问题进行了探讨,指出必须在材料制备过程中通过控制粉体颗粒大小、掺杂、采用双层膜技术等改善其微观结构,才能提高材料的气敏性能。
In order to summarize new research development on preparation technologies of nano-sized α-Fe2O3 gas powder and film ,advances in the study on preparation technologies of α-Fe2O3 gas sensing material were reviewed. The problems are focused on the low sensitivity,poor se-lectivity and stability of the sensors. It is presented that the problems could be resolved by controlling the size of the grain,doping,preparing multilayer thin film and so on.
出处
《中国粉体技术》
CAS
2006年第6期34-38,43,共6页
China Powder Science and Technology
基金
国家高技术研究发展计划(863计划)资助项目
编号:2004AA302032。
关键词
气敏材料
粉体
薄膜
制备技术
gas sensing material
powder
film
preparation tochnology
