基于AFM的微机械表面抗粘附薄膜性能

Investigation on the Properties of Anti-adhesive Films on MEMS Surfaces by AFM

用原子力显微镜(AFM)考察施加OTS分子润滑膜前后Si(100)表面的粘附、摩擦性能,并对比了空气相对湿度、扫描速度对粘附、摩擦性能的影响效果。结果表明,施加OTS膜后可以有效降低Si(100)表面粘附力和摩擦系数,呈现较好的润滑性能,且受空气相对湿度变化的影响较小。另外,适当提高扫描探针扫描速度,可以改善Si(100)表面和OTS膜表面摩擦性能,降低摩擦力。

The adhesive and tribological properties of Si（100） surface and OTS film were studied by AFM/LFM, and the effect of relative humidity and scanning velocity between them were compared. The results showed that the adhesive force of the surface covered with OTS film was much smaller than that of Si（100） substrate which led to a relatively low friction coefficient, thereby the OTS film presented better lubricant performance~ Besides, Si（100） substrate was much more affected by the variation of humidity than OTS film~ The velocity effect on the frictional performance was more significant for Si（100） component due to Si（OH）4 lubricant film caused by the tribo-chernical reaction, OTS lubricant film exhibited not only better durability but also comparative stability. In addition, a theoretical model to explain the humidity effect and velocity effect was put forward.