纳米测量机工作台导轨高精度误差分离原理

The High Precision Error Separating Principle and Technique of the Guide Strip of Nanometer Measuring Machine's Working Table

为了高精度分离与修正纳米测量机工作台直线度运动和角运动误差引起的阿贝误差,介绍了一种利用速度瞬时中心进行分离的方法,推导了工作台在任意时刻的速度瞬时中心坐标计算公式,根据该公式计算出由于直线度引起的工作台上任意测量点的坐标测量误差.从原理上设计了直线度误差分离与修正的实验方案,解决了传统阿贝误差分离与修正方法中以旋转中心为工作台中心点、阿贝臂长度计算不准确的问题.

A high precision error separating and correcting method of Abbe error which is caused by the linearity error of the guide strip of nanometer measuring machine＇s working table by using the definition of velocity instant center was introduced. The calculating formula of the velocity instant center coordinate in X＆ Y direction at random time of the working table and the coordinate measuring error of the random position on the working table which is caused by the linearity error was deduced. The experimental scheme of the linearity separation and correction was designed. The problem of incorrect calculating method of the Abbe arm＇s length was solved which is caused by the judgment in the traditional Abbe error separation and correction method that it is believed the rotating center of the working table is the center point.