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等离子体中频电源的驱动与保护电路设计 被引量:1

Design of Intermediate Frequency Plasma Power Supply Drive and Protection Circuit
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摘要 讨论了150 kHz等离子体中频电源的驱动与保护电路设计方案。该电路采用脉冲变压器耦合MOSFET管驱动电路,具有输出变压器原边平均电流和副边峰值电流的过流保护功能。结果表明:驱动波形的上升和下降时间都不超过80 ns,并能在检测到过流信号时封锁驱动信号,关断变换器中的开关器件,切断过流故障,有效进行电路保护。 This paper discusses the drive circuit and protection circuit design scheme of 150 k Hz. The circuit, with overcurrent protection of output transformer original side average current and side peak current,adopts pulse transformer coupling MOSFET driving circuit. Results show: rising and falling time of driving waveforms are no more than 80 ns. In addition,blocking driving signals while detecting over- current signals,turning off swiching device in the convertor, cutting off over - current thus fault, protecting circuit efficiently.
出处 《现代电子技术》 2007年第1期78-80,共3页 Modern Electronics Technique
基金 国家民委科研基金项目(05ZN03)
关键词 等离子体电源 中频 驱动电路 保护电路 plasma power supply intermediate frequency drive circuit protection circuit
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