摘要
为了减小扫描系统测量误差,可以利用半导体激光器注入式调频装置和光栅来建立扫描系统。通过改变注入电流来改变半导体激光器的输出光频,使输出光入射在光栅上,随着频率的改变,衍射光的衍射角会发生改变,进而衍射光点的位置发生改变,从而实现无机械光点扫描,能够消除扫描测量过程中机械抖动和振动带来的误差。
In order to reduce the measurement error of scanning system, the scanning system can be designed with frequency-modulated laser diode and a grating. The frequency of the beam can be easily modulated by modulation of the laser diode injection current. When the beam reaches to a grating,the diffraction angle will be changed with the frequency modulation ,and then the light-spot＇s position will be different. The diffracted ray can be used to scan the object without any mechanical movement and the measurement error will be reduced.
出处
《光学仪器》
2006年第6期73-77,共5页
Optical Instruments
关键词
LD光频调制
衍射光栅
PSD
迈克尔逊干涉仪
frequency modulation of laser diode
diffraction grating PSD Michelson interferometer
