纳米压痕硬度计测方法的研究进展

Progress in Nanoindentation Hardness Calculation and Measurement Methods Research

针对纳米尺度下的材料硬度测量,利用纳米硬度计得到压痕的载荷-压深曲线,并用原子力显微镜得到压痕的三维形貌图。通过载荷-压深曲线和压痕形貌图,以及相应的计算方法,可以得到纳米压痕硬度。纳米压痕硬度计测方法不同,得到的材料硬度值也不同。分析现有的几种纳米压痕硬度计测方法,找出它们的优缺点,并对未来发展方向做了展望。

For the hardness testing at nano-scale, the load-depth curves are obtained by nanoindention testing machine and real 3-demention morphology images of indentation are obtained by atomic force microscopy. The nanoindentation hardness can be achieved by these curves, images and corresponding calculating method. The nanoindentation hardness values are different because of different calculation and measurement methods. Comparing and analyzing these methods, their advantages and disadvantages are presented, and the future tendency of nanoindentation hardness calculation and measurement methods is presented.