非平衡磁控溅射CrTiAlN镀层摩擦学性能分析

Analysis on the Tribological Properties of CrTiAlN Coatings Deposited by Unbalanced Magnetron Sputter

为探讨C rT iA lN镀层高硬度、低磨损机理,应用UDP850/4镀层设备,在高速钢和单晶硅基体上制备了C rT iA lN复合镀层,并测试了其力学性能和摩擦学性能,采用XRD、SEM、TEM等手段对镀层微观组织结构进行了分析。结果表明:在75 V负偏压下沉积的镀层具有显微硬度高、摩擦系数小,磨损率低,膜/基结合和韧性良好;镀层由C rN、T iN、A lN、C r2N和T i2N等纳米晶组成;纳米晶粒弥散于非晶的结构是硬度增强的机理;良好的膜基结合、韧性好和低摩擦系数是镀层具有低磨损的原因。

To explore the mechanism of high hardness and low wear rate that CrTiAlN composition coating has, CrTiAlN composition coating has been produced using UDP850/4 on M2 high speed steel and silicon substrates, Mechanics properties and tribological properties of that coating were measured. Different methods including XRD, SEM, TEM were employed for analyzing its structure. The test result showed that the coatings properties deposited at 75 V minus substrate bias voltage had favorable performance： high micro-hardness, low friction coefficient, litter wear rate, excellent adhesion, high toughness. The main part of the coating was formed as a nano-scale multiplayer, there are large amorphous phase in coating. The grain in CrAlTiN coating includes CrN, AlN, TiN, Cr2N and Ti2N crystal grain which size belongs to nano-scale; the structure which nano-crystal distributes in amorphous coating is the mechanism that led to harden. The coating has excellent wear resistance, which is attributed to its excellent adhesion, high toughness and low friction coefficient.