MEMS弹簧特性的有限元分析

Analysis on characterization of micro-spring based on MEMS by FEM

利用有限元分析软件ANSYS对镍质平面S型MEMS弹簧进行实体建模、静力学有限元计算分析,得到了各结构参数对刚度的影响规律,明确了其刚度特性。ANSYS仿真结果与镍质平面S型微弹簧的实际拉伸实验结果一致性很好,证明ANSYS软件对微弹簧力学性能的模拟较为准确。本文的分析方法对于其它类似的MEMS器件的分析有一定的借鉴意义,研究成果为平面微弹簧的优化设计与加工提供了依据,具有实际应用价值。

The stiffness characterization of planar S-form micro-springs based on MEMS technology is concluded through finite element analysis of a nickel micro-spring with ANSYS, and the variation law of the stiffness in elastic range is also illustrated in theory. The results of ANSYS simulation are tally with that of the tensile test of the nickel micro-spring, which demonstrates effectively the rationality and validity of ANSYS in simulating mechanical properties of MEMS spring. The preduetion of this paper is valuable for providing feasible directions to the optimization design and manufacture of the micro-spring and to the study of other parts of MEMS.