基于单片式电容传感器的动态测厚技术

The Research of Measuring Thickness Dynamic Technology on Single-piece Capacitance Sensor

介绍一种新型的单片式电容传感器,同时应用此传感器研制出一种薄膜动态测厚系统,这种装置必将大大提高生产厂家的生产率,提高产品的质量;使经济效益得到明显的提高。

In this paper, a new type of single -piece capacitance sensor is designed and a kind of new system for dynamic measurement on-line of membranc is developed. It will greatly improve the labor productivity and the quality of products, and the economic.