摘要
介绍了三氟化氮(NF3)的基本物化性质及生产方法。为了满足电子工业对其纯度要求,采用的三氟化氮纯化方法有:低温精馏法、共沸精馏法、吸收法、选择吸附法以及各种方法的联用技术。
This paper reviews the basic physical and chemical property of nitrogen trifluoride, including production method. In order to meet the need of semiconductor industry, the applied purification methods its for nitrogen trifluoride are： cryogenic distillation, azeotropic distillation, absorption, selective adsorption and the combination of them.
出处
《化学工业与工程》
CAS
2007年第1期86-90,94,共6页
Chemical Industry and Engineering
关键词
三氟化氮
纯化
精馏
吸收
吸附
nitrogen tfifluoride
purification
distillation
absorption
adsorption
