基于PSD的位置测量系统

The Position-measuring System Based on PSD (Position Sensitive Detector)

介绍了PSD和基于PSD的位置测量系统的工作原理,探讨了基于PSD的位置测量系统的硬件、软件和基本电路,并对系统误差进行了分析。

This paper introduces the operating principle of PSD and the position measure system based on PSD, probes into the hardware, software and circuit of position-measuring system based on PSD, and analyzes on the systemic error.