摘要
微泵是生物芯片的关键因素之一,因此选择适合生物芯片的微泵是首要工作。很多因素都会影响微泵的性能,本文对不同的致动器、材料、加工和制备方式进行了分析和比较,并着重介绍了微泵的激光加工。结合生物芯片易集成、易控制、易加工等要求,在诸多种类的微泵中进行优化选择,认为平面无阀压电微泵是生物芯片的最佳选择。
Micropump is one of the most important factors in Bioehip, so the choice of micropump is the first step. Many factors influence the quality of micropump. This paper discussed the shortcomings and the excellence of actors, materials, fabrication and bonding, and focused on the fabrication of micropump. Considering the needs of Biochip, i. e. the mieropump must be easily being integrated, controlled, fabricated, the flat-walled valveless diffuser pump were selected out as the optimum selection in Biochip from many kinds of micropumps.
出处
《北京生物医学工程》
2006年第6期663-665,共3页
Beijing Biomedical Engineering
基金
国家863项目(2004AA404260)资助
关键词
生物芯片
微泵
激光加工
最佳选择
biochip micropump laser fabrication optimum selection