微型薄膜瞬态热流计的研究与开发

Research and Development of a Thin-film Transient Heat Flux Mini-sensor

为满足燃料电池内微小空间内瞬变大热流的测量要求,利用薄膜技术,制作了热阻式微型薄膜瞬态热流计测头.该测头在厚度为0.05 mm的SiO2基片上蒸镀薄膜热电偶,测量厚度为1μm的SiO2热阻层两侧温差,从而得出瞬变热流值.同时,利用自行开发的标定系统对微型薄膜瞬态热流计测头进行了标定和响应测试,并对标定过程中的误差进行了细致的分析.对比得出,开发的热流计测头在响应时间和测头尺寸上,能满足微小空间内瞬态热流的测量需求.

By using thin-film depositing technology, a thermal-resistant miniature thin-film transient heat flux sensor is developed by the authors. It is calibrated by using a calibration system developed by the authors, too. Moreover, the test of response has been done by using this calibration system and the results are compared with its predecessors. All results show that the heat flux sensor has its advantage in response speed and dimensions.