摘要
利用脉冲激光沉积(PLD)的方法,在SiO2/Si衬底成功制备了钙钛矿结构的La0.5Sr0.5CoO3薄膜.对制备的薄膜生长的薄膜进行了XRD测量分析,并且对薄膜的表面形貌进行了测量分析.着重对薄膜的电阻进行了测量,发现环境气氛对电阻的影响,进而对薄膜湿敏电阻进行了测量.
La0.5Sr0.5CoO3 films have been deposited on SiO2/Si subtracts successfully by the Pulse Laser Deposition. Then the XRD and SEM of La0.5Sr0.5CoO3 films have been measured and analyzed. In particular,measuring the resistance of the film reveals that the environment has influence on the resistance. So the humidity sensitivity resistance of the LSCO films is measured.
出处
《昆明理工大学学报（理工版）》
2006年第6期22-24,共3页
Journal of Kunming University of Science and Technology(Natural Science Edition)
基金
云南省教育厅科学研究基金(项目编号:5y0663D)
关键词
脉冲激光溅射沉积
镧锶钴氧薄膜
湿敏电阻
pulsed laser deposition
La0．5Sr0．5CoO3 film
humidity sensitivity resistance
