CAD在光学薄膜设计和生产中的应用

Application of CAD in Design and Manufacture for Optical thin Films

本文介绍了计算机辅助设计（ＣＡＤ）在光学薄膜设计和生产中的应用，并给出了几个典型设计实例。利用ＣＡＤ评价光学薄膜厚度的允差和设计在镀膜过程中的膜层厚度监控规律，以及简化镀膜工艺，大大提高了镀膜效率，给人们带来极大的效益。

The paper introduced applications of computer asisted design(CAD) in a design and manufacture for optical thin films and gives a few of typical design examples.Allowance differences of optical thin film thickness are calculated by CAD;film thickness programme controled in coating process is also designed by CAD;as well as a typical instance for a coating process simplified is given,which enhance a coating effeciency and bring some benefits to the people.