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快速热处理法制备单晶硅太阳能电池 被引量：1

Monocrystalline silicon solar cells fabricated by rapid thermal processing
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摘要 利用快速热处理(RapidThermalProcessing,RTP)技术,成功制备了单晶硅太阳电池。在三个重要的热处理环节(磷扩散制作P-N结、热氧化、电极烧结)采用了快速热处理法,电极制作采用了丝网印刷。初步研究,用大面积的单晶硅片制备出转换效率为11%、开路电压为564.6mV、短路电流密度为30.7mA/cm2的太阳电池。 Monocrystalline silicon solar cells were successfully fabricated by rapid thermal processing(RTP) technique,which include rapid thermal phosphorus diffusion,oxidation and metallization.The initial work has resulted in a 62 cm2 cell with conversion efficiency of 11% ,open voltage of 564.6 mV and short current density of 30.7 mA/cm2 on 1 Ω·cm Cz Si using rapid thermal processing technique and screen-printing (SP) technique for the front and back contacts.
作者 花聚团 杨德仁 席珍强 倪利红 阙端麟
机构地区 浙江大学硅材料国家重点实验室
出处 《材料热处理学报》 EI CAS CSCD 北大核心 2006年第6期10-13,共4页 Transactions of Materials and Heat Treatment
基金 国家"十五"科技攻关计划(2004BA410A02) 教育部留学回国人员基金 浙江省自然基金项目(Y105468)
关键词 快速热处理(RTP) 硅 太阳电池 rapid thermal processing silicon solar cells
分类号 TK514 [动力工程及工程热物理—热能工程]
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参考文献19

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二级参考文献47

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共引文献6

同被引文献7

  • 1Xianrong C,Li Y S, Jiemin Z. Three dimensional simulation of melt flow in Czochralski crystal growth with steady magnetic fields [ J ]. Journal of Crystal Growth,2012,340 ( 1 ) : 135 - 141.
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  • 3Young-ho H, Bok-cheol S,Kwang-bo S. Effect of zero-Gauss plane and magnetic intensity on oxygen concentration in cusp-magnetic CZ crystals[ J]. Journal of Crystal Growth ,2006,295 (2) : 141 - 147.
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  • 6Yoan C,Olivier M, Nathalie V B, et al. Effective simulation of the effect of a transverse magnetic field (TMF) in Czochralski Silicon growth [ J ]. Journal of Crystal Growth ,2012,360 ( 1 ) :18 - 24.
  • 7周潘兵,柯航,周浪.热处理和冷却速率对直拉单晶硅少子寿命的影响[J].材料热处理学报,2012,33(8):23-27. 被引量：3

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材料热处理学报
2006年 第6期

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