薄膜体内缺陷对损伤概率的影响

Effect of bulk inclusion in films on damage probability

由实验中得到的激光损伤概率与表面杂质密度的关系出发,结合XRD测试和激光损伤测试的结果,得到体缺陷或杂质破坏起主导作用的损伤机理.将激光作用时杂质吸收的热学和力学过程与杂质分布的统计规律结合起来,得到了深埋于薄膜内部的杂质诱导薄膜损伤概率与杂质密度、激光功率密度以及薄膜厚度的关系.该模型认为能诱导薄膜破坏的杂质尺寸范围与杂质填埋深度有关,所以不同深度处能诱导薄膜损伤的杂质密度不一样,理论结果与实验结果符合得很好.该理论模型还可以很好地解释损伤形貌.

From the relation between damage probability and density of surface inclusion, combining with the test results of XRD and laser induced damage, we have drawn a conclusion that bulk inclusions dominate the damage in these experiments. Combining thermal and mechanical processes of inclusion absorption and the statistical rule of inclusion density, we have deduced an equation describing the relation between damage probability and density of inclusions, power density of laser pulse, as well as thickness of films. From the model in this paper, we can see that the range of siges in which the inclusions can initialize damage alter with the depth of inclusions. So density of the dangerous inclusions in different depth is different. The results from theory and from experiments are identical. This model can also interpret damage morphology.