摘要
以普通石英光纤为材料,运用腐蚀-熔拉-腐蚀复合的方法制备出光纤探针;而后在针尖侧面镀上一层数十纳米厚的金属膜,实现导电性与导光性,使其能传导隧道电流和探测近场光,并在实际测量中取得了理想的测试结果。
The nanometer order optical fiber probes were fabricated from ordinary single mode quartz optical fiber with the etching-pulling-etching method. The probe was evaporated on the side by a metal film, whose thickness was tens nanometer order. Then the optical fiber probe had the property of conduct electricity and ray, and could conduct tunnel current and detecting the evanescent wave. The good experimental results were obtained in a practical measurement.
出处
《微纳电子技术》
CAS
2007年第1期39-42,共4页
Micronanoelectronic Technology
基金
国家自然科学基金资助项目(69877014)
湖北省教育研究项目资助(2003298)
关键词
光纤探针
扫描隧道显微镜
隧道电流
optical fiber probe
scanning tunnel microscopy
tunnel current
