微结构器件宏模型的建模方法

Compact modelling methods for micro-structure device

主要描述了微机械器件宏模型的构建问题。以微悬臂梁为例子,阐述了等效电路法、节点分析法、S—空间矩匹配方法、模态—Galerkin方法构建微机械宏模型的研究概况以及各个宏建模方法的优、缺点。

The cantilever microbeam was chosen as an example of illuminating how to extract the compact model. These macro-modelling methods include equivalent circuit representation, nodal design （ NODAS）, moment-matching proeedure in the s-space and mode-Galerkin＇s procedure. The major contributions and the advantages and disadvantages of each approach were summarized and discussed.