摘要
采用微波PCVD方法在单晶硅片上制备出了金刚石膜．利用拉曼光谱和X射线射三行射(XRD)研究了不同甲烷浓度对在硅基底上沉积金刚石膜的内应力的影响,同时用XRD研究,抛光对于自支撑金刚石膜的宏观应变和微观应变的影响．
Diamond film was synthesized on signal crystal Si substrate with different methane concentration by microwave PCVD method. The effect of stress was characterized using Laman spectrum and X - ray diffraction （XRD）. The macroscopical and microcosmic strain of diamond film from surface polishing was studied.
出处
《吉林师范大学学报（自然科学版）》
2006年第4期10-12,共3页
Journal of Jilin Normal University:Natural Science Edition
关键词
金刚石膜
甲烷浓度
内应力
diamond film, methane concentration, stress
