摘要
采用销相技术，对电子束曝光机工件台运动实现速度环的全数字控制。设计了数字差频积分回路和数字差频比例控制器，能有效消除速度的静态误差和改善系统的动态特性。
The movement of stage of EB exposure machine has been controlled digitally by the speed loop with phase-locked method.The digital inlegrator circuit and proportional control circuit of differential frequency are designed to eliminate static error of the speed and improved the dynamic characteization of the system effectively.
出处
《微细加工技术》
1996年第2期7-11,共5页
Microfabrication Technology
关键词
电子束曝光机
工件台
锁相技术
稳速控制
electron beam exposure machine
stage
phase-locked method
speed stabilization
