磁控真空电弧沉积TiN膜的扫描电镜分析

SEM ANALYSIS OF TIN FILM PREPARED BY MAGNETIC FIELD-STEERED VACUUM ARC

利用扫描电镜，分析了磁控电弧沉积的氨化钛膜微观形貌。实验表明，阴极磁场对膜层的形貌有显著的影响，合理的磁场设计可减少膜层中的宏观颗粒（ＭＰ）；膜的表面形貌主要受ＭＰ的影响，但当基片表面起弧时，弧痕对表面形貌的影响比ＭＰ的影响大；ＭＰ粒径多数在１～３微米之间，但少数的ＭＰ也可能大于十几微米或１微米以下。对ＭＰ的形貌分析表明，ＭＰ的形态与其粒径有关，较小的ＭＰ顶部呈圆球形，而较大的ＭＰ顶部扁平，且底部有微孔。

This paper presents some morphology analyses on TiN films prepared by magnetically steered vacuum arc. It reveals that macroparticles can be deducedby proper designing of cathode magnetic field. The surface finish is dominated by the size of the macroparticles. If arc occurs on the substrate the finish is mainly determined by remained arc tracks. The average diameter of the macroparticlesis about 1～3μm with some extremes up to several tens of microns or even lessthan one micron. Detailed observation on the shapes of macroparticles showsthat the macroparticles vary in shapes versus their diameters, i. e. the smallermacroparticles turn up to be domed, but the bigger to be ellipsoid-roofed andwith some micro-holes in the bottom.