磁悬浮式微动工作台驱动方案的设计与实现

Driving Scheme Design and Realization of a Magnetic Levitation Micromotion Stage

磁悬浮式微动工作台由于运动平台和驱动机构采用非接触式的磁悬浮驱动技术而易于实现大范围高精度的微运动.本文论述了磁悬浮式微动工作台驱动电路的主要性能参数、驱动方案的选择,设计了两种驱动电路,并进行了实验研究,最后根据试验结果对两种驱动电路进行分析比较,得出了满足该磁悬浮式微动工作台运动要求的驱动方法,为磁悬浮式微动工作台的整体设计及其控制提供了技术支持.

Magnetic levitation micromotion stage is easy to realize micromotion with high resolution because a contact-free magnetic levitation technique is used between the moving plate and the driving part. The main parameters of drive circuit and the choice of driving scheme of a magnetic levitation micromotion stage have been discussed. Two circuits based on the driving scheme have been designed and studied by experiments. Finally, the experimental results of the two drive circuits have been analyzed and compared, then, the drive method satisfied the demand of this stage＇s movement has been presented.