摘要
为了制造一种新型气敏传感器,研制了二氧化锡超微粒薄膜,并对其结构作了研究。此外,还估算了它的内表面积。
Abstract:For preparation of a new type of gas sensor,the tin dioxide ultrafine parti-cle films are investigated,and their structure is also studied.In addition,the inner sur-face area of the films is estimated.
出处
《电子科技大学学报》
EI
CAS
CSCD
北大核心
1990年第5期504-508,共5页
Journal of University of Electronic Science and Technology of China
关键词
气敏传感器
SIO2
薄膜
结构
tin dioxide films
ultraline particle films
organization structure of film
porous columar structure
inner surface area
