钼基和铪基上溅射碳膜的某些特性

PROPERTIES OF SPUTTERED CARBON FILMS ON Mo AND Hf SUBSTRACTES

微波管电极表面涂复碳膜能改善管子性能。本文介绍了采用高频溅射热解石墨的方法在Mo基和Hf基上形成碳膜的一些研究情况。包括碳膜的制造、成分分析,次级发射性能和热辐射特性以及在真空系统中随温度上升释放气体的质谱分析等。主要结果有:(1)复碳钼有明显的吸氧效应;(2)钼、铪上复碳后次级发射系数降为δ_(max)(?)0.7;(3)高温时(930℃)钼基上的碳膜会很快消失,但铪基上的碳膜到1050℃仍无明显变化;(4)复碳钼在高温时有一定量的CH_4形成。

The investigations of carbon films which are coated on Mo and Hf by using RF sputtering method are presented, including the preparation of carbon films, analysis of the composition of them, their secondary emission and thermal radiation properties and mass analysis of gas released from carbon coated Mo and Hf when heated in vacuum. Main results are: (1) carbon coated Mo can absorb oxygen easily as compared with carbon coated Hf; (2) the maximum secondary emission coefficient of carbon coated Mo or Hf is about 0.7; (3) the carbon coated on Mo is used up at 930癈 or so, but the carbon coated on Hf makes little change until 1050癈; (4) considerable amount of CH4 is formed as carbon coated Mo is heated in vacuum.