YAG基片的机械抛光研究

Research on the Mechanical Polishing for YAG Pieces

通过对机械抛光后的YAG表面进行了研究,结果表明:合理优化工艺参数,可获得较好的面形和较低的粗糙度,影响抛光效率的因素为磨粒、正压力和转速。采用较大粒度的磨粒,合理的增加压力和转速,有利于提高抛光效率。

This paper studied the YAG pieces which had been mechanically polished. The result indicated that there were several factors that influence the polishing efficiency, including grind granule, positive pressure and rotate speed. The proper pressure and speed are beneficial to improving polishing efficiency for bigger grind granule.