摘要
An Si(001)/SiO2/Ti/Pt/Fe/Cu multilayer was prepared by direct-current magnetic sputtering system. The phase composition of the film was characterized by X-ray diffractometry(XRD), and the microstructure was observed by scanning electronic microscopy(SEM). Through the film annealed in magnetic field perpendicular to the surface of the film, FCC FePt film with (001) texture was obtained. And the density of the particle in the film annealed without magnetic field is very small compared with that in the film annealed with magnetic field. And the effect of magnetic field annealing on the microstructure of Fe/Pt film and the segregation of FCC FePt phase were also discussed.
An Si（001）/SiO2/Ti/Pt/Fe/Cu multilayer was prepared by direct-current magnetic sputtering system. The phase composition of the film was characterized by X-ray diffractometry（XRD）, and the microstructure was observed by scanning electronic microscopy（SEM）. Through the film annealed in magnetic field perpendicular to the surface of the film, FCC FePt film with （001） texture was obtained. And the density of the particle in the film annealed without magnetic field is very small compared with that in the film annealed with magnetic field. And the effect of magnetic field annealing on the microstructure of Fe/Pt film and the segregation ofFCC FePt phase were also discussed.
出处
《中国有色金属学会会刊：英文版》
CSCD
2006年第B01期324-326,共3页
Transactions of Nonferrous Metals Society of China
关键词
Fe/Pt薄膜
磁场退火
磁记录系统
织构
显微结构
Ll0-FePt
magnetic recording system
uniaxial magnetic anisotropy
magnetic field annealing
texture
