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Characterization and wear properties of nanoscaled TiN/TaN multilayer coatings 被引量:1

Characterization and wear properties of nanoscaled TiN/TaN multilayer coatings
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作者 安健 张庆瑜
出处 《中国有色金属学会会刊:英文版》 CSCD 2006年第A02期59-64,共6页 Transactions of Nonferrous Metals Society of China
基金 Project (20050509) supported by the National Science Foundation of Jilin Province, China
关键词 氮化物 TiN/TaN 多层复层 物理汽相淀积 磨损性质 multilayer coatings nitrides physical vapor deposition wear properties
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