摘要
A novel method to measure the temperature on the surface of micro-hotplate was presented. The tiny fiber probe and the optical power meter were employed to measure the sample radialization power. By means of comparing the relationship between the radialization power and the temperature, sample surface temperature can be discerned accurately. Such an approach has provided more accuracy than traditional temperature measurements. The experimental result based on this method is quite similar to that of simulation by the finite element analysis (FEA) software of Ansys in theory. This measurement is very useful for measuring temperature for these micro samples prone to be untouchable.
A novel method to measure the temperature on the surface of micro-hotplate was presented. The tiny fiber probe and the optical power meter were employed to measure the sample radialization power. By means of comparing the relationship between the radialization power and the temperature, sample surface temperature can be discerned accurately. Such an approach has provided more accuracy than traditional temperature measurements. The experimental result based on this method is quite similar to that of simulation by the finite element analysis （FEA） software of Ansys in theory. This measurement is very useful for measuring temperature for these micro samples prone to be untouchable.
出处
《中国有色金属学会会刊：英文版》
CSCD
2006年第B02期780-784,共5页
Transactions of Nonferrous Metals Society of China
基金
Project (60104006) supported by the National Natural Science Foundation of China Project(20030322) supported by the Science Technology Office of Jilin Province
关键词
气体传感器
微型热盘
辐射功率
温度测量
热分布
micro-hotplate
temperature
heat distributing
radialization power
optical power meter
fiber probe
