用三区振幅和相位滤波器优化固体浸没透镜显微系统的光场分布

Optimizing the optical field distribution of solid immersion lens microscopy systems using the three-zone amplitude-only and phase-only filters

构造了三区振幅型和相位型滤波器,用矢量衍射理论分析了两种滤波器对固体浸没透镜显微系统透射场的优化作用。从光斑大小、聚焦强度(Strehl比)和边瓣强度等方面比较了两种滤波器的超分辨特性。数值结果指出,振幅型滤波器具有边瓣强度小,边界参数容限大的优点。相位型滤波器的超分辨效果比振幅滤波器的好,它的聚焦强度比振幅型的大。但是它的边瓣强度比振幅型的大。

The three - zone amplitude - only and phase - only filters are desired. The optimizing of the filters for the transmitted field of solid immersion lena microscopy systems is analyzed using the vector diffraction theory. The superresolution effect of the two types of filters is compared, including tile spot size, the Strehl ratio, and the sidelohe intensity Namerical remits show that the amplitude - only filter results in small sidelobe intensities and its tolerance to boundary parameters is larger, compared with the phase- only filter. However, The superresoluting power of the phase - only filter is higher, the Strehl ratio is larger,hut the sidelobe intensity is larger than that of the amplitude - only filter.