常见扫描电镜图像损坏原因和解决方法

Common causes for the damage of scanning electron microscopic images and the improvement methods

讨论了喷金效应、荷电效应、电子束损伤效应、边缘效应以及污染等损坏SEM图像质量的因素,提出了解决办法。

Common factors that can reduce the quality of scanning electron micoroscopic images, such as gold injection effect, charging effect, electron beam damage effect and pollution, are discussed. The improvement methods are proposed.