臭氧水在TFT制造工艺中的作用

Functions of the Ozone Water in the Technigue of TFT Manufacture

本文阐述了臭氧水在薄膜晶体管制造工艺中所起的清洗及成膜作用。在薄膜晶体管制造中,引入臭氧水工艺,增强了它的可控性,增加了欧姆接触,降低点欠陷数量,提高成品率。

This article elaborates the functions of the ozone water in the technique of the thin film transistor manufacture are not only cleaning but also the formation of oxided film. In the thin film transistor manufacture, the technique introducting ozone water is benificial to strengthen the technique＇s controllability, increase ohm contact, fall down the quantities of defects, and enhance the end product rate.