等离子化学气相沉积硬膜技术研究

Hard Coatings Prepared by PCVD

用等离子体化学气相沉积（ＰＣＶＤ）技术制备了ＴＩＮ、ＴｉＣ、Ｔｉ（ＣＮ）和（ＴｉＳｉ）Ｎ膜及其组合的多层膜。ＰＣＶＤ具有很好的覆盖性，ＰＣＶＤ－ＴｉＮ具有很好的耐磨、蚀性，膜与基体结合良好，因而用ＰＣＶＤ法在高速钢刀具、模具及轴承上沉积ＴｉＮ可大大提高其使用寿命。ＰＣＶＤ－ＴｉＮ和Ｔｉ（ＣＮ）膜无明显柱状晶，其显微硬度高于ＴｉＮ亦可用于高速钢刀具、模具上提高其使用寿命。ＰＣＶＤ－（ＴｉＳｉ）Ｎ，晶粒细化，氯含量和显微硬度随Ｓｉ含量而变化，（ＴｉＳｉ）Ｎ具有很好的抗高温氧化性。多层膜可调节膜层结构，减少残余应力，提高膜的机械性能。

TiN, TiC, Ti(CN),(TiSi) N hard coatings and their multicomponent mixed layerswere prepaied by PCVD. PCVD-TiN coatings exhibited good wear-resistace, corrosion-resistance andgood adhesion, so PCVD-TiN catings on the tools, moulds and bearings with HSS could greatlyincrease their working life. Unlike coventional PVCD-TiN, no columnar growh were noticeable inPVCD-TIC and Ti (CN) coatings, whose microhardness was higher than TiN coatings and which couldalso be used in HSS tools and increase the working life of tools. The fine-grained structures could begot in PVCD- (TiSi) N in which the Cl content and microhardriess were changed with Si content.(TiSi) N codings were good antiokidant. Multilnyers could modulate the layed structures, reduce theresidual streases and incrare the mechanical properties of the coatings.