摘要
Nanocomposites on the base of thin films SnO_2 with additives of metal oxides such as SiO_2,ZrO_2,MnO_2 and others,were prepared by reactive ion-beam sputtering of metal target in the ambient of O_2+At,and then thermal treated at 500℃.Atomic composition and morphology of thin film nanocomposites were investigated.Electrical properties and gas sensitivity of nanocomposites were studied.It Was determined that the grain size of polycrystals depends on the film composition and can run down to 10 nm.It was found that temperature of maximal gas sensitivity of the films depends on their composition as well and it can be decreased by 100℃～150℃lower than temperature of maximal sensitivity of undoped films SnO_2.
Nanocomposites on the base of thin films SnO2 with additives of metal oxides such as SiO2, ZrO2, MnO2 and others, were prepared by reactive ion-beam sputtering of metal target in the ambient of O2 ＋ Ar, and then thermal treated at 500℃. Atomic composition and morphology of thin film nanocomposites were investigated. Electrical properties and gas sensitivity of nanocomposites were studied. It was determined that the grain size of polycrystals depends on the film composition and can run down to 10 am. It was found that temperature of maximal gas sensitivity of the films depends on their composition as well and it can be decreased by 100℃-150℃ lower than temperature of maximal sensitivity of undoped films SnO2.
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2006年第A03期33-35,共3页
Rare Metal Materials and Engineering
基金
The work was supported by grant of Russian Foundation for Basic Research N 03-02-96453.
