摘要
Integrated gas sensor suspending bridge style micro-structure has been developed on Al_2O_3 new type membrane based on MEMS.CH_4 gas sensing unit and CO gas sensing unit were fabricated separately on 4 unit array style suspending bridge structure.We have studied on time-sequence modulation form voltage pulse heating method which forms different work temperature
Integrated gas sensor suspending bridge style micro-structure has been developed on Al2O3 new type membrane based on MEMS.CH4 gas sensing unit and CO gas sensing unit were fabricated separately on 4 unit array style suspending bridge structure. We have studied on time-sequence modulation form voltage pulse heating method which forms different work temperature conditions.
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2006年第A03期173-175,共3页
Rare Metal Materials and Engineering
