摘要
The mass sensitivity of a layered surface acoustic wave (SAW) device,ZnO/36°LiTaO_3,has been studied.Gold layers of different thicknesses were deposited to form the protein-sensitive layer,in order to compare the responses to biological materials and to find the optimum thickness of the gold thin film.Sensitivity of the device was investigated by immobilization of lactate dehydrogenase (LDH) onto the device active area.
The mass sensitivity of a layered surface acoustic wave (SAW) device, ZnO/36° LiTaO3, has been studied. Gold layers of different thicknesses were deposited to form the protein-sensitive layer, in order to compare the responses to biological materials and to find the optimum thickness of the gold thin film. Sensitivity of the device was investigated by immobilization of lactate dehydrogenase (LDH) onto the device active area.
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2006年第A03期327-329,共3页
Rare Metal Materials and Engineering