摘要
A new membrane type Al_2O_3 micromachining material is used.We develop an environmental multi-parameter detection micro-system,which implements the detection to temperature,humidity,wind speed,and CO.The test results illustrate that the heat-release unit in micro-system intercross greatly affects other sensing units on the temperature.We study the method of etching process,which formed cavity to reduce the heat exchange efficiency and decrease temperature intercross effect.
A new membrane type Al2O3 micromachining material is used. We develop an environmental multi-parameter detection micro-system, which implements the detection to temperature, humidity, wind speed, and CO. The test results illustrate that the heat-release unit in micro-system intercross greatly affects other sensing units on the temperature. We study the method of etching process, which formed cavity to reduce the heat exchange efficiency and decrease temperature intercross effect.
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2006年第A03期377-380,共4页
Rare Metal Materials and Engineering
