摘要
Based on flip-chip packaging,a novel approach towards integrated magnetic bio-separator was designed.The magnetic field and the force on the bead were simulated and analyzed,leading to the optimization of the fabrication parameters of the micro-magnetic unit.The planar coil as an electromagnet was fabricated through electroplating on a single seed layer. The PDMS microfluidic channel was bonded on the inverse side after Si etching.The results presented in this paper provide a novel design and fabrication to approach a microfluidic bio-separation system with magnetic beads.
Based on flip-chip packaging, a novel approach towards integrated magnetic bio-separator was designed, The magnetic field and the force on the bead were simulated and analyzed, leading to the optimization of the fabrication parameters of the micro-magnetic unit. The planar coil as an electromagnet was fabricated through electroplating on a single seed layer. The PDMS microfluidic channel was bonded on the inverse side after Si etching. The results presented in this paper provide a novel design and fabrication to approach a microfluidic bio-separation system with magnetic beads.
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2006年第A03期421-424,共4页
Rare Metal Materials and Engineering
