摘要
One of today's challenges is the integration of ISFETs in chemical and biochemical Microsystems.This article presents a full integration of ISFET chip containing the ISFET/REFET(reference FET) pair,ISFET/REFET amplifiers,bias current generator,as well as a reference electrode structure,all integrated on the same chip based on CMOS technology.The sensor chip was fabricated in a standard 0.35μm CMOS process(Chartered Semiconductor,Singapore).The extra post processing steps have been developed and added for depositing membranes.Finally,the pH response of the integrated sensor was measured with the interface circuit.
One of today＇s challenges is the integration of ISFETs in chemical and biochemical Microsystems. This article presents a full integration of ISFET chip containing the ISFET/REFET （reference FET） pair, ISFET/REFET amplifiers, bias current generator, as well as a reference electrode structure, all integrated on the same chip based on CMOS technology. The sensor chip was fabricated in a standard 0.35 μm CMOS process （Chartered Semiconductor, Singapore）. The extra post processing steps have been developed and added for depositing membranes. Finally, the pH response of the integrated sensor was measured with the interface circuit.
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2006年第A03期443-446,共4页
Rare Metal Materials and Engineering
基金
supported by National Natural Science Foundation of China(No.90307014)
