纳米压痕仪和激光超声技术检测薄膜弹性模量

Comparative study about the determination of the Young's modulus of thin layers with the instrumented indentation test and the laser-acoustic measuring method

在薄膜材料的力学性能测定中,弹性模量是衡量材料软硬程度的重要指标。为了测定弹性模量,本文选取不同种类和厚度的金属薄膜材料,采用纳米压痕技术(nanoindentation)和激光超声技术(laser-acoustics)两种测试方法相互比较,以确保测试的准确性。两种方法在膜厚较大的试样测试中得到了大致相符的试验结果,相对误差最小达到2%。

For the characterization of the mechanical properties of thin films the Young＇s modulus plays an important role. In order to state the accuracy of the corresponding measurements and further to increase their accuracy, two methods are compared with a set of layer materials： the nanoindentation test and the laser-acoustic measuring method. The results from the laser-acoustic measuring method fits properly with that of nanoindentation test.