一种反磁控冷阴极真空规的脉冲操作模式

Pulased Mode of Inverted-Magnetron Cold-cathode Gauge

冷阴极真空规应用时有较大的抽气作用,而且放电产生的热量和离子溅射对电极表面的污损也使其正常操作受到一定影响。为此,本文设计了一种智能脉冲高压电路,对一种反磁控冷阴极真空规(IMG)的脉冲放电测量模式、恒流放电测量模式及不同压强下的伏安特性等问题进行了实验研究。指出将低压强下的直流放电模式和较高压强时的脉冲放电模式结合起来是反磁控冷阴极真空规的一种较为合理的应用方法。

An intelligent, high voltage pulse generating circuit was developed to study the pulsed discharge mode and constant current operation mode of an inverted-magnetron gauge（IMG）. I- V characteristics of the IMG under different pressures were measured. We found that integration of the two measurements of the IMG：DC discharge at low pressure and the pulsed discharge at high pressure,gives satisfsctory results.