摘要
为满足现代微电路生产工艺线工艺水平评价需要,在对三类典型皮尔逊分布的中心矩与原点矩进行分析研究的基础上,推导了针对该分布的拟合表达式,得到了相应分布类型的参数,并给出分布拟合算法。并且对实际微电路工艺的应用结果表明,拟合结果令人满意。
In order to make evaluation to modern process, a probability distribution family named Pearson distribution is introduced and its three types of probability density function are deeply analyzed. Based on the study of distribution＇s central moments and origin moments, fitting method is suggested and by which the parameters of the distribution are obtained.The fitting result is satisfying.
出处
《电子质量》
2007年第2期31-34,共4页
Electronics Quality
关键词
皮尔逊分布
拟合
中心矩
原点矩
工序能力
Pearson distribution
Fitness
Central moments
Origin moments
Process capability
