用力-距离曲线标定原子力显微镜力测量系数的研究

Calibrating Force Measurement Coefficient of Atomic Force Microscopy with Force-distance Curve

推导出根据原子力显微镜测量得到的电压信号计算法向力和横向力的公式,然后研究用力-距离曲线标定公式中测量系数的方法,并用几种不同的探针和试样测试和确定所用原子力显微镜的测量系数。从测量的结果可以看到,不同探针和试样的测量值较为接近,表明该方法可行。当原子力显微镜测量系统的光路对称时,用本方法标定测量系数较为简单和准确。

The equations to calculate normal and lateral force between sample and tip of an atomic force microscopy from the voltage measured were deduced. The method to gain measurement coefficient of an atomic force microscopy on the equation with a force-distance curve was discussed. Different tips and samples were used to measure the coefficient. From the results of the experiment, the values gained are close to each other, which show the method is feasible. The method is simple and accurate when the path of ray of the atomic force microscopy is symmetry.