XPS定量分析及其在CdTe(Ⅲ)面识别化学物种中的应用

Application of Quantitative XPS to Chemical Species Identification on Surface (Ⅲ) of CdTe

我们用谱仪能量传输函数修正的相对原子灵敏度因子获得了XPS定量数据。通过将定量结果与结合能的化学位移相结合的方法,分析了CdTe表面的两个氧化过程,结果表明,机械抛光样品表面的构成是:66%CdTe,28.9%的Cd(OH)2和5.1%TeOx(X>2),而经化学抛光的表面构成是∶84.4%的TdTeO4和15.6%TeOx(X>1)

Thc two oxidation processes occurred on the surface of CdTe were studied by the quantitative XPS (X ray photoelectron spectroscopy)method combined with the binding energy chemical shift method.The quantitative XPS data were obtained by employing the relative atomic sensitivity factors after correction for the transmission function of the instrument.Our results indicate that the surface chemical composition of sample I (mechanically polished)is CdTe 66%,Cd(OH) 2 28.9% and TeO x(x>2)5.1%;while sample Ⅱ(chemically etched)has a surface composition of 84.4% CdTeO and 15.6% TeO x(x>1).