MEMS技术在流体控制中的应用

The Application of MEMS in Fluid Control

微机电系统(MEMS:Micro Electro-Mechanical System)技术或微传感器与微执行器(MicromachinedTranducers)技术,它是在微电子技术的基础上发展起来的,融合了硅微加工和精密机械加工等多种微加工技术,并利用IC技术把控制和信号处理电路与机械部件集成的微型系统。这种技术所涉及的器件的特征尺寸一般小于1mm而大于1μm,它为流体控制研究开辟了一个崭新的领域。简述了流体控制技术的基本原理以及应用MEMS技术实现流体控制的机理和途径,分别介绍了国外研究机构近年来在微传感、微执行技术的研究工作。

MEMS（Micro Electro-Mechanical System） or Micromachined Tranducers is developed from the basis of microeletronics, it not only has been combined with various micromachined technology such as silicon micromachining and precision machinng, but also utilizes IC technology. Microelectromechanical systems refer to devices that have characteristic length of less than 1 mm but more than 1 μm, it combines electrical and mechanical components and is fabricated using integrated circuit batch-processing techniques. It opens a new field for the fluid control research.The basic principle of the fluid control and the motheds of mems on fluid control is presented.