离子渗钨-钼锯条溅射率与吸收率的研究

Study on Spattering Ratio and Absorptivity of W and Mo by Ion Penetrating

将74μm(200目)的W和Mo粉按重量比2:8均匀混合,经过成型、烧结、轧制,制成尺寸为300mm×60mm×8.5mm的板状源极,利用双层辉光离子渗金属技术,在以20钢为基材的手用锯条齿部表面,渗入W、Mo元素形成合金化层。通过100炉次共计50万支离子渗W、Mo手用锯条生产,计算出源极W、Mo原子的平均溅射率为0.095。W、Mo原子被锯条齿部表面的平均吸收率为26%。

The plank target of W-Mo alloy（2：8 by weight） with 64-74 μm thickness and 300×60×8.5 mm in size was prepared through mixing, molding, sintering and rolling. The alloying layer was formed on the saw blade tooth of 20 steel by ion penetrating W and Mo. According to the statistics of five handred thousands saw blade production, it can be known that the atomic average spattering ratio of W and Mo is 0.095.and average absorptivity of the saw blade tooth is 26 %.