摘要
通过失重法进行微蚀速率测定,对过硫酸氢钾复合盐与过硫酸钠在PCB微蚀刻中的应用效果进行了对比研究。分析了SPS浓度、KMPS浓度对蚀刻速率的影响,阐明了硫酸浓度、硫酸铜含量与KMPS、SPS蚀刻速率的各自关系。试验结果表明:过硫酸氢钾体系的性能优于过硫酸钠体系。
The application of Potassium Monopersulfate Compound and Sodium Persulfate in PCB micro-etch was studied comparably by loss-weight to measure the micro-etch velocity. The effects of SPS and PMPS concentration on the etching velocity were analyzed, and the relations of H2SO4 and CuSO4 concentration with KMPS and SPS etching velocity were showed respectively. Experiments indicate that the performance of Potassium Monopersulfate Compound system is more excellent than that of sodium persulfate.
出处
《表面技术》
EI
CAS
CSCD
2007年第1期78-80,共3页
Surface Technology
基金
上海市科研计划项目(055958043)
