摘要
提出了一种二维压电射流陀螺。采用双垂直热电阻丝,敏感二维角速度;通过简支边支撑压电泵振子,提高了陀螺的灵敏度;采用叠片状圆台凹槽型喷嘴,提高了该陀螺的稳定性和重复性;利用软件补偿处理,提高了陀螺的温度性能和线性度。实验表明,该陀螺的灵敏度提高近一倍,零位变化量从10%下降到≤0.2%,工作温度从–10^+40℃扩展到–45^+65℃,非线性度从1%下降到≤0.5%,灵敏度的变化量从10%下降到≤0.6%。
A two-dimensional piezoelectric fluidic gyroscope was described. The sensibility of gyroscope was improved by using two vertical hot wires to sense two-dimensional angular velocity and simply-supported edges to support piezoelectric pump vibrator. Stability and repeatability were also improved with a laminated circle fluted nozzle. Temperature performance and linearity were improved with software compensation. Obtained results show that sensibility increases by almost one time than before, null voltage variation decreases from 1% to 0.5 %, operating temperature range extends from -10-＋40℃ to -45-＋65℃, nonlinearity decreases from ≤1% to ≤0.5%, and sensibility variation decreases from ≤ 10 % to ≤0.6 %,
出处
《电子元件与材料》
CAS
CSCD
北大核心
2007年第2期14-16,共3页
Electronic Components And Materials
基金
国家自然科学基金资助项目(60272001)
北京市传感器重点实验室资助项目(53053003)
北京市优秀人才培养资助项目(20051D0500704)
北京市属高校"学术创新团队计划"资助项目
关键词
电子技术
射流陀螺
结构设计
角速度
electron technology
fluidic gyroscope
structure design
angular velocity
